1 1 1 Trichloroethane

C2H3Cl3

1 1 2 Trichloroethane

C2H3Cl3

1 1 3 3-tetramethyl-1 3-disilacyclobutane

C6H16Si2

1 2 Dichloroethane

C2H4Cl2

1 2-Dichlorobenzene

C6H4Cl2

1 2-Dichloroethylene trans

C2H2Cl2

1 2-Dichloropropane

CH3CHClCH2Cl

1 3 Butadiene

C4H6

1-Butanol

C4H10O

1-Butyl Acetate

C6H12O2

1-Butyl Alcohol

CH3(CH2)2CH2OH

1-Hexene

C6H12

1-Methoxy-2-Propanol

C4H10O2

1-Octene

C8H16

1-Pentene

C5H10

1-Propyl Acetate

C5H10O2

2- 2-aminoethoxy Ethanol

H2NC2H4OC2H4OH

2-Ethoxyethanol

C4H10O2

2-Ethoxyethylacetate

C6H12O3

2-Heptanone

C7H14O

2-Methoxyethanol

C3H8O2

2-Methoxyethyl Acetate

C5H10O3

2-Methoxyethyl Ether

C6H14O3

2-Pentanone

C5H10O

2-Propanol

C3H8O

3-Chloropivaloylchloride

ClCH2C(CH3)2COCl

3-Ethoxy-1-Propanol

C5H12O2

Acetaldehyde

C2H4O

Acetic Acid

C2H4O2

Acetic Anhydride

(CH3CO)2O

Acetone

(CH3)2CO

Acetonitrile

CH3CN

Acetylene

C2H2

Acrolein

C3H4O

Acrylonitrile

C3H3N

Aluminum Oxide

AL203

Ammonia

NH3

Argon

Ar

Arsenic Pentafluoride

AsF5

Arsenic Trichloride

AsCl3

Arsenic Trifluoride

AsF3

Arsine

AsH3

Benzene

Benzin

C6H6

Benzyl Alcohol

C7H8O

Boron 11 Trifluoride

B11F3

Boron Tribromide

BBr3

Boron Trichloride

BCl3

Boron Trifluoride

BF3

Bromine

Br2

Bromomethane

CH3Br

Butane

C4H10

Butanol

C4H9OH

Butyl Acetate

C6H12O2

Butyl Cellosolve Acetate

C8-H16-O3

Butylrolactone

C4H6O2

Carbon Dioxide

CO2

Carbon Disulfide

CS2

Carbon Monoxide

CO

Carbon Tetrachloride

CCl4

Carbonyl Fluoride

COF2

Carbonyl Sulphide

COS

Chlorine

CL2

Chlorine Dioxide

CIO2

Chlorine Trifluoride

ClF3

Chlorobenzene

C6H5Cl

Chlorodifluoromethane

CHClF2

Chloroethane

C2H5Cl

Chlorofluorocarbons – CFCs

CFC

Chloroform

CHCl3

Chloromethane

CH3Cl

Chlorotrifluoroethylene

C2ClF3

Combustibles (LEL)

CVD-3000 Silicon Cabide Precursor

LEL

Cyanogen

C2N2

Cyclohexane

C6H12

Cyclohexanol

C6H12O

Cyclohexanone

C6H10O

Cyclopentane

C5H10

Cyclopentanone

C5H8O

Decamethyltetrasiloxane

C10H30O3Si4

Desflurane

C3H2F6O

Diborane

B2H6

Dichloro 1 1 Fluoro 1 Ethane

CCl2FCH3

Dichloroethane

C2H4Cl2

Dichlorofluoromethane FC-21

CHCl2F

Dichloromethane

CH2Cl2

Dichloropentafluoropropane

C3HCl2F5

Dichlorosilane

H2SiCl2

Diethoxymethyloxiranylsilane

C7H16O3Si

Diethyl Ether

(C2H5)2O

Diethylbenzene

C10H14

Diethylene Triamine

C4H13N3

Diethyltelluride

(C2H5)2Te

Difluorine monoxide

OF2

Difluoromethane

CH2F2

Digermane

Ge2H6

Dimethyl Acetamide

C4H9NO

Dimethyl Amine

C2H7N

Dimethyl Ether

C2H6O

Dimethyl Formamide

C3H7NO

Dimethyl Sulfoxide

C2H6OS

Dimethylamine

(CH3)2NH

Dimethyldiethoxysilane

C6H16O2Si

Dimethyldimethoxysilane

C4H12O2Si

Dimethylethylamine

C4H11N

Dimethylformamide

HCON(CH3)2

Dimethylhydrazine

C2H8N2

Dimethylphenylsilane

C6H5-SiH-(CH3)2

Dimethylsilane

C2H8Si

Dimethylvinyl Disilazane

C8H19N4Si

Dimethylzinc

(CH3)2Zn

Dioxane

C4H8O2

Dipropylamine

C6H15N

Disilane

Si2H6

d-Limonene

C10H16

Enflurane

C3H2ClF5O

Epichlorohydrin

ClCH2C2H3O

Ethane

C2H6

Ethanol

CH3CH2OH

Ethanolamine

NH2-C2H4OH

Ethyl 3-ethoxypropionate

C7H14O3

Ethyl Acetate

CH3-COO-CH2-CH3

Ethyl Amine

C2H7N

Ethylbenzene

C6H5CH2CH3

Ethyl Lactate

C5H10O3

Ethyl Pyruvate

C5H8O3

Ethylacrylate

C5H8O2

Ethylene

C2H4

Ethylene Diamine

C2H8N2

Ethylene Dichloride

C2H4Cl2

Ethylene Glycol

C2H6O2

Ethylene Glycol Monobutyl Ether

C6H14=2

Ethylene Oxide

C2H4O

Ethylidene Norbornene

C9H12

Fluorine

F2

Fluorinert FC3283

(C3F7)3N

Fluorinert FC-40

C21N2F48

Fluorinert FC-77

(C8F18)n.(C8F16O)m

Fluorocarbons

CxFy

Fluoromethane

CH3F

Formaldehyde

HCHO

Formamide

HCONH2

Freon 11

CFCl3

Freon 113-TF

CF3CCl3

Freon 114

C2Cl2F4

Freon 116

C2F6

Freon 12

CF2Cl2

Freon 13

CClF3

Freon 134a

C2H2F4

Freon 13B1

CF3Br

Freon 14

CF4

Freon 23

Freon Fluorinert

Freon Galden

CHF3

Galden HT110

CF3-[(OCFCF3CF2)n-(OCF2)m]-OCF3

Galden HT-200

CF3-[(OCFCF3CF2)n-(OCF2)m]-OCF3

Galden HT70

CF3-[(OCFCF3CF2)n-(OCF2)m]-OCF3

Germane

GeH4

Germanium

Ge

Glutaraldehyde

C5H8O2

Halon 1211

CF2ClBr

Halon 1301

CBrF3

Halothane

C2HBrClF3

HCFC-225ca

C3HF5Cl2

HCFC-225cb

C3HF5Cl2

Heptane

C7H16

Hexachlorodisilane

Si2Cl6

Hexafluoro-1 3-Butadiene

C4F6

Hexafluorobenzene

C6F6

Hexafluoropropylene

C3F6

Hexahydrophtalic anhydride

C8H10O13

Hexamethyl diamine

C6H16N2

Hexamethyldisilane

C6H18Si2

Hexamethyldisiloxane

C6H18OSi2

Hexane

C6H14

Hexene

C6H12

HFE 347E

HFE 347E

HFE 7100

HFE 7100

HFE71

C5F9OH3

HFE-7200

C4F9OC2H5

HMDS

(CH3)3SiNHSi(CH3)3

Hydrazine

N2H4

Hydrochlorofluorocarbons – HCFCs

HCFC’s

Hydrogen

H2

Hydrogen Bromide

HBr

Hydrogen Chloride

HCl

Hydrogen Cyanide

HCN

Hydrogen Fluoride

HF

Hydrogen Iodide

HI

Hydrogen Peroxide

H2O2

Hydrogen Selenide

H2Se

Hydrogen Sulfide

H2S

Hydroxylamine

NH2OH

Iron pentacarbonyl

Fe(CO)5

Isceon 89

Isceon 89

Isobutane

C4H10

Isoflurane

C3H2ClF5O

Isopentane

C5H12

Isopropyl Alcohol

C3H8O

Isopropyl acetate

CH3COOCH(CH3)2

Isopropyl alcohol

CH3CHOHCH3

Isopropyl amine

Kerosene

C3H9N

Krypton

Kr

Methane

CH4

Methanol

CH3OH

Methyl 3-methoxyacrylate

C5H8O3

Methyl 3-methoxypropionate

C5H10O3

Methyl acrylate

C4H6O2

Methyl amine

CH3NH2

Methyl Amyl Ketone

C7H14O

Methyl Ethyl Ketone

CH3C(O)CH2CH3

Methyl Fluoride

CH3F

Methyl Formate

C2H4O2

Methyl Iodide

CH3I

Methyl Isobutyl Ketone

(CH3)2CHCH2C(O)CH3

Methyl Methacrylate

CH2=C(CH3)COOCH3

Methyl silane

CH6Si

Methyldiethoxysilane

C5H14O2Si

Methyldimethoxysilane

C3H9-O2Si

Methylene Chloride

CH2Cl2

Methylene Dianiline

MDA

Methylethanol amine

C3H9NO

Methylmethacrylate

C5H8O2

Methyl-t-butylether

C5H12O

Methyltriethoxysilane

C7H18O3Si

Methyltrimethoxysilane

C4H12O3Si

Micronox from Kyzen

mixture

m-xylene

C8H10

n-Butanol

C4H9OH

n-ButylAcetate

C6H12O2

n-Butylamine

n-BA

Neptunium

Np

n-Heptane

C7H16

n-Hexane

CH3(CH2)4CH3

Nitric Acid

HNO3

Nitric oxide

NO

Nitrogen Dioxide

NO2

Nitrogen Monoxide

NO

Nitrogen Trifluoride

NF3

Nitrous Oxide

N2O

n-methylpyrollidinone

C5H9NO

n-octane

C8H18

n-Pentane

C5H12

Octafluorocyclobutane

C4F8

Octafluorocyclopentane

C5F8

Octafluoropropane

C3F8

Octamethylcyclotetrasiloxane

C8H24O4Si4

Octamethyltetrasiloxane

C8H24O4Si4

Oxygen

O2

O-Xylene

C8H10

O-Xylol

C8H10

Ozone

O3

Pentane

C5H12

Pentanol

C5H12O

Perchloroethylene

Cl2C=CCl2

Perfluorohexane

C6F14

Perfluoromethyl Vinyl Ether

C3H3F3O

Perfluoropropylvinylether

C5F10O

Petroleum ether

C7H7BrMg

PF5050

PF5050

Phenol

C6H5OH

Phenyl Trichlorosilane

C6H5Cl3Si

Phosgene

COCl2

Phosphine

PH3

Phosphorous Oxychloride

POCl3

Phosphorous Pentachloride

PCl5

Phosphorous Pentafluoride

PF5

Phosphorous Tribromide

PBr3

Phosphorous Trichloride

PCl3

Phosphorous Trifluoride

PF3

Pinene beta

C10H16

p-Phenylene Diamine

Praseodymium

PPD

Propanal

CH3CH2CHO

Propane

C3H8

Propylene

C3H6

Propylene glycol

βC3H8O2

Propylene Glycol Methyl Ether Acetate

PMA

Propylene glycol monomethyl ether

C4H10O2

Propylene Oxide

CH3CHCH2O

Propyleneglycol monomethylether acetate

CH3CO2CH(CH3)CH2OCH3

P-Xylene

C8H10

P-Xylol

C8H10

R11

CCl3F

R12

CCl2F2

R123

C2HF3Cl2

R-123

C2HF3Cl2

R125

C2HF5

R134

C2H2F4

R134A

C2H2F4

R13B1

CF3Br

R22

R227

R245A

R404A

R407C

R410A

R507A

R508B

CHClF2

Sevoflurane

C4H3F7O

Silane

SiH4

Silicon Tetrachloride

SiCl4

Silicon Tetrafluoride

SiF4

Stibine

Stoddard solvent

SbH3

Styrene

C6H5CH=CH2

Sulfur Dioxide

SO2

Sulfur Tetrafluoride

SF4

Sulfuric Acid

H2SO4

Sulphur Dioxide

SO2

Sulphur Hexafluoride

SF6

Terpinene alpha

C10H16

Tert-Butylamine

C4H11N

Tertiary Butyl Arsine

TBA

Tertiary Butyl Phosphine

TBP

Tetrachlorsilan

SiCl4

Tetraethyleneglycol diacrylate

C4H22O7

Tetraethylorthosilicate

TEOS

Tetrafluoroethylene

C2F4

Tetrahydrofuran

(CH2)4O

Tetrahydrofuran alcohol

C5H10O2

Tetrakis-dimethylamido- titanium-dimethylamine

C8H24N4Ti

Tetrakis-trifluorophosphorus-nickel

Ni(PF3)4

Tetramethlyl cyclotetrasiloxane

(HSiCH3O)4

Tetramethyl silane

(CH3)4Si

Tetramethylammonium hydroxide

(CH3)4NOH

Tetramethylene sulfone

C4H8O2S

Tin Tetrachloride

SnCl4

Titanium

Ti

Titanium Tetrachloride

TiCl4

Toluene

CH3

Toluene Diamine

TDA

Trichloroethylene

C2HCl3

Trichlorophosphorus oxide

POCl3

Trichlorosilane

HSiCl3

Triethyl borate

(C2H5O)3B

Triethyl phosphate

(CH3CH2)3PO4

Triethylamine

N(CH2CH3)3

Triethylarsenate

(C2H5O)3AsO

Triethylene tetramine

C6H18N4

Trimethyl amine

N(CH3)3

Trimethyl benzene

C9H12

Trimethyl borate

(CH3O)3B

Trimethyl phosphate

(CH3)3PO4

Trimethyl phosphite

(CH3O)3P

Trimethylarsine

As(CH3)H

Trimethylboron

B(CH3)3

Trimethylmethoxy silane

C4H12OSi

Trimethylsilane

C3H10Si

Trimethylsilylacetylene

C5H10Si

Trimethylsilylacetylene bis

C2(Si(CH3)3)2

Trimethylsilylimidazole

C6H12N2Si

Trimethylvinylsilane-TMVS

(CH3)3SiCHCH2

Tungsten Hexafluoride

WF6

Vinyl acetate

C4H6O2

Vinyl Chloride

H2C=CHCl

Vinyl Fluoride

C2H3F

VinylmethyldiEthoxysilane

C7H16O2Si

VinylmethyldiMethoxysilane

C5H12O2Si

Vinylphenylmethylsilane

(CH2=CH)-SiH-(CH3)(C6H5)

Volatile Organic Compounds

VOC

Xenon

Xe

Xenon Difluoride

XeF2

Xylenes

C8H10